Consulting Service for the semiconductor and microelectronic industry, FEA modeling, mechanical, electrical & materials engineering applications.
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FEA allows for comprehensive modeling of the chamber’s integrity during testing conditions. The FEA model serves as a virtual experiment that allows reduction in prototype cost and testing. An accurate model can reduce the costly repercussions of an incorrectly designed system.
High-Purity Gas Panels Part 10:
Pressure Transducers in Semiconductor Equipment
Semiconductor equipment engineers, usually mechanical engineers or electrical engineers, have some of these same purposes in mind when they install pressure transducers directly on semiconductor tools, with the additional goal of granting the tool operator control over the pressures of incoming gas and in the process chamber.
Glew Engineering Consulting Inc.
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